Excimer Lamp, UV조사장치
Flat type Features
By our proprietary technology, it is a lamp capable of high intensity
and high uniform irradiation.
and high uniform irradiation.
Tact and yield improvement can be expected.
• High intensity
Because it is a special lamp that emits the entire surface, the irradiation light quantity is also high, it can irradiate with high intensity
• High uniformity
It can uniformly irradiate uniformly with +5 to 10% or less.
• Intensity stability
Although the intensity of conventional lamps decreases with temperature rise, you can monitor stable intensity by monitoring intensity value.
• Lamp replacement
Replace the lamp as a single lamp or as a lamp replacement unit, so you can exchange it relatively easily.
Tube type Features
It is a standard type of excimer lamp.
• Combine the number and length of lamps by purpse.
Ecximer lamp Lineup
Flat type
| Semiconductor | QEF-300SPC | QEF-230SPC | QEF-160 | QEF-100 | QEF-35ST | QEF35ST-V126 |
|---|---|---|---|---|---|---|
| wavelength | 172nm | 126nm | ||||
| Utility | N2/Cooling water/AC100 ~ 240V | |||||
| Uniformity | ±5% | ±7% | ||||
| Aperture | Ф332mm | 218x218mm | 167x167mm | Ф100mm | Ф35mm | Ф35mm |
| Corresponding work size | 12inch | 8inch | 6inch | 4inch | - | - |
| intensity | 80mW/cm2 | 80mW/cm2 | 30mW/cm2 | 30mW/cm2 | 5mW/cm2 | 5mW/cm2 |
| FPD | QEF-1600 | QEF-600 | QEF-320 |
|---|---|---|---|
| wavelength | 172nm | ||
| Utility | N2/Cooling water/AC100 ~ 240V | ||
| Uniformity | ±10% | ||
| Aperture | 70x1670mm | 70x620mm | 70x312mm |
| Corresponding work size | G6 | G3 | - |
| intensity | 180mW/cm2 | 180mW/cm2 | 100mW/cm2 |
